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Vlsi Fabrication Principles: Silicon And Gallium Arsenide, 2Nd Ed

This edition covers the fundamental principles underlying fabrication processes for semiconductor devices along with integrated circuits made from silicon and gallium arsenide. Diverse technologies are introduced separately and then consolidated into complete circuits. · material properties · phase diagrams and solid solubility · crystal growth and doping · diffusion · epitaxy · ion implantation · native films · deposited films · etching and cleaning · lithographic processes · device and circuit fabrication